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Lithography
Lithography

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Product Detail
LITHOGRAPHY

Process introduction

Lithography is an important step in the semiconductor device manufacturing process, using exposure and development on the photoresist layer to depict the structure of the device, and then through the etching process to convert the graphics on the mask to the substrate. MEMS currently master electron beam lithography, step lithography, contact lithography and other lithography technologies


Technical application

Lithography is mainly used in semiconductor devices, integrated circuit manufacturing process.


Application materials

Wafers, glass, sapphire, flexible materials, etc.


Process capability

Step lithography: stepper i7/i1 0/i12, minimum line width 600nm, alignment deviation accuracy ±200nmContact and proximity

lithography: MA6/BA6 lithography machine, minimum line width 2um, exposure error t0.5umUltraviolet lithography, duplex lithography, alignment engravingSize: 8', 6', 4', 2'




Sub 1: PlutoChip Co., Ltd    -Discrete Devices and Integrated Circuits-    www.plutochip.com
Sub 2: PlutoSilica Co., Ltd   -Silicon Wafer and Glass Wafer Manufactory-
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