| Diameter |
2" |
3" |
4" |
5" |
6" |
8" |
| Thickness (um) |
Depends on Request |
| Material |
Fused Silica |
| Grade/Brand |
JGS2/JGS1/JGS3 |
| Surface Finished |
DSP/SSP |
| TTV (um) |
<8 |
<10 |
<10 |
<10 |
<15 |
<20 |
| Bow/Warp (um) |
<30 |
<30 |
<40 |
<40 |
<60 |
<60 |
| Ra (nm) |
<1 |
| S/D (um) |
40/20 |
| Fused Silica |
| Mechanical |
Units of Measure |
SI/Metric |
(Imperial) |
| Density |
gm/cc (lb/ft3) |
2.2 |
-137.4 |
| Porosity |
% (%) |
0 |
0 |
| Color |
— |
clear |
— |
| Flexural Strength |
MPa (lb/in2x103) |
— |
— |
| Elastic Modulus |
GPa (lb/in2x106) |
73 |
-10.6 |
| Shear Modulus |
GPa (lb/in2x106) |
31 |
-4.5 |
| Bulk Modulus |
GPa (lb/in2x106) |
41 |
-6 |
| Poisson’s Ratio |
— |
0.17 |
-0.17 |
| Compressive Strength |
MPa (lb/in2x103) |
1108 |
-160.7 |
| Hardness |
Kg/mm2 |
600 |
— |
| Fracture Toughness KIC |
MPa•m1/2 |
— |
— |
| Maximum Use Temperature (no load) |
°C (°F) |
1100 |
-2000 |
| |
|
|
|
| Thermal |
|
|
|
| Thermal Conductivity |
W/m•°K (BTU•in/ft2•hr•°F) |
1.38 |
-9.6 |
| Coefficient of Thermal Expansion |
10–6/°C (10–6/°F) |
0.55 |
-0.31 |
| Specific Heat |
J/Kg•°K (Btu/lb•°F) |
740 |
-0.18 |
| Electrical |
|
|
|
| Dielectric Strength |
ac-kv/mm (volts/mil) |
30 |
-750 |
| Dielectric Constant |
@ 1 MHz |
3.82 |
-3.82 |
| Dissipation Factor |
@ 1 MHz |
0.00002 |
-0.00002 |
| Loss Tangent |
@ 1 MHz |
— |
— |
| Volume Resistivity |
ohm•cm |
>1010 |
— |
Fused quartz or fused silica is glass consisting of silica in amorphous (non-crystalline) form. It differs from traditional glasses in containing no other ingredients, which are typically added to glass to lower the melt temperature. Fused silica, therefore, has high working and melting temperatures. Although the terms fused quartz and fused silica are used interchangeably, the optical and thermal properties of fused silica are superior to those of fused quartz and other types of glass due to its purity. For these reasons, it finds use in situations such as semiconductor fabrication and laboratory equipment. It transmits ultraviolet better than other glasses, so is used to make lenses and optics for the ultraviolet spectrum. The low coefficient of thermal expansion of fused quartz makes it a useful material for precision mirror substrates.
